Vacuum Systems and Technology

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  • 3 Sequences
  • Intermediate Level

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Course details

Syllabus

Section 1. Vacuum theory

  • Vacuum application. Introducing on molecular-kinetic theory of gases
  • Molecular-kinetic theory of gases
  • Sorption phenomena in vacuum
  • Condensation and evaporation
  • Physical processes in vacuum

Section 2. Mechanical means of obtaining a vacuum

  • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 1
  • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 2
  • Turbine and diffusion pumps. Construction, working principles and characteristics
  • Ejector pump. Vacuum traps. Construction, working principles and characteristics

Section 3. Physical-chemical means of obtaining a vacuum

  • Ion and ion-getter pumps. Construction, working principles and characteristics
  • Sublimation and sputter ion pumps. Construction, working principle, characteristics
  • Sorption and condensation pumps. Construction, working principles and characteristics

Section 4. Methods of pressure measurement

  • Methods of total pressure measurement. Aneroid and hydrostatic vacuum gauges
  • Methods of total pressure measurement. Thermal vacuum gauges
  • Methods of total pressure measurement. Ionization vacuum gauges
  • Methods of partial pressure measurement. Type of analyzers and traps
  • Methods of partial pressure measurement. Mass-spectrometers

Section 5. Constructional elements of vacuum systems

  • Valves and gates. Construction, working principle
  • Leek valves. Construction, working principle
  • Vacuum feedthroughs
  • Methods of leak detection

Section 6. Construction principles of vacuum systems

  • Calculation of vacuum systems to select of vacuum pumps
  • Vacuum systems with diffusion and turbine pumps
  • Vacuum systems with ion and condensation pumps
  • Type of sealing

Prerequisite

Knowledge of general physics

Instructors

Valikov A. Roman
Post graduate, engineer of department "Physical problems of Materials Science"
National Research Nuclear University “MEPhI”

Editor

National Research Nuclear University “MEPhI” is one of the most recognized technical universities in Russia. It is the only research nuclear university in Russia. The aim of the university existence is preparing the specialists for nuclear industry, science, information technology and other high-tech sectors of Russian economy. National Research Nuclear University “MEPhI” implements postgraduate professional education curricula (PhD and postdoctoral level), carries out fundamental and applied scientific research in high-priority fields of science and technologies. Among MEPhI graduates are Nobel Prize winners, members of the Russian Academy of Sciences, and winners of national prizes. Its professors and alumni have made major contributions to various fields of theoretical and experimental physics, mathematics, cybernetics, and computer sciences.

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