link Source: www.edx.org
list 7 sequences
assignment Level : Advanced
chat_bubble_outline Language : English
language Subtitles : French
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Key Information

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verified_user Fee-based Certificate
timer 21 hours in total

About the content

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.

In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.

  • How to select the correct fabrication process for a specific micro-device or microsystem
  • Establish the workflow for the cleanroom processes
  • Identify how physical and chemical phenomena govern miniaturized systems for various applications
  • Resource planning for a given microsystem fabrication

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Prerequisite

Basics in Physics and Chemistry

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Syllabus

Week 1: MEMS and cleanroom introduction
This module introduces the basics of electromechanical systems (MEMS) and cleanroom fabrication. Week 2: Chemical vapor deposition (CVD)
This module on chemical vapor deposition or CVD describes in detail basic principles of CVD and will show you the cleanroom infrastructure that is used to run a CVD process. Week 3: Physical vapor deposition (PVD)
This module on physical vapor deposition describes in details the two main PVD methods; thermal evaporation and sputtering. Week 4: Lithography
This module on lithography describes in details the two main resist patterning methods: optical and electron beam lithography. Week 5: Dry etching
This module on dry etching describes etching in a gas environment. We will introduce etching directionality and anisotropy and give a few simple rules for choosing dry etching processes for specific materials in a plasma reactor and provide theoretical concepts that characterize a plasma in a dry etching equipment. Week 6: Wet etching
This module on wet etching describes etching in a liquid environment. We will introduce anisotropic wet etching of silicon substrates, where certain lattice planes are etched and others not, isotropic etching of silicon, and finally thin membrane microfabrication techniques using wet etching. Week 7: Inspection and metrology
This module describes methods of inspection and metrology based on four technique categories: optical, mechanical, charged beam and electrical.

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Instructors

Juergen Brugger
Professor in Microengineering and Materials Science
EPFL

Martin Gijs
Professor of Microsystems
EPFL

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Content Designer

École Polytechnique Fédérale de Lausanne

The École polytechnique fédérale de Lausanne (EPFL, English: Swiss Federal Institute of Technology in Lausanne) is a research university in Lausanne, Switzerland, that specialises in physical sciences and engineering.

One of the two Swiss Federal Institutes of Technology, the school was founded by the Swiss Federal Government with the stated mission to:

Educate engineers and scientists to the highest international standing
Be a national center of excellence in science and technology
Provide a hub for interaction between the scientific community and the industry
EPFL is considered one of the most prestigious universities in the world for engineering and sciences, ranking 17th overall and 10th in engineering in the 2015 QS World University Rankings; 34th overall and 12th in engineering in the 2015 Times Higher Education World University Rankings.

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Platform

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